B, the first High-NA EUV lithography tool designed for commercial production, reiterating Intel's plans to use High-NA EUV patterning for 14A process technology and onwards.
As anticipated, this year’s Advanced Lithography + Patterning Symposium was a very informative event, with many interesting papers being presented across a wide range of subjects. Many papers ...
The critical role of EUV pellicles: These thin membranes protect photomasks from contaminants, reducing defect rates and ensuring flawless chip production. The limitations of traditional materials: ...