When preparing cross sections, the standard procedure using the FIB-SEM technique is the use of high currents to quickly remove material, then lower the FIB current for an improved beam profile and ...
Utilizing FIB-SEM, nanofluidic lab-on-a-chip devices for the analysis of single DNA molecules were characterized and fabricated. Direct FIB nanopatterning of silicon master stamps enables the quick ...
A focused ion beam scanning electron microscope (FIB-SEM) equipped with a compact time-of-flight secondary ion mass spectrometer (ToF-SIMS) 1,2 and traditional energy dispersive X-ray spectroscopy ...
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