Numerical Technologies is trying to take its phase-shift mask technology out of just making shorter gates and into the interconnect layers of chips as the chipmakers try to push 193nm equipment deeper ...
SANTA CLARA, Calif. — During the SPIE Microlithography conference here, ASML MaskTools Inc. entered the phase-shift software photomask market with a product that promises to extend optical lithography ...
Experts at the Table: Semiconductor Engineering sat down to discuss optical and EUV photomasks issues, as well as the challenges facing the mask business, with Naoya Hayashi, research fellow at DNP; ...
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