GaN chip developers look set to benefit from an in situ pyrometer that can measure wafer temperatures with a precision of ±0.1°C. Richard Stevenson speaks to Thomas Zettler of optical sensor ...
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A pyrometer, invented by Josiah Wedgwood, is an instrument which measures relatively high temperatures, like that of a furnace. What is a pyrometer? A pyrometer, invented by Josiah Wedgwood, is an ...