High power magnetron sputtering techniques have become essential tools in the deposition of advanced thin films. By utilising high power pulses, these methods generate highly ionised plasmas that ...

Sputtering Technique Sputtering is a process wherein a controlled gas, typically chemically inert argon, is introduced into a vacuum chamber and then a cathode is electrically energized to generate a ...

Thin films play a crucial role in the fabrication of several components and devices, such as protective coatings, integrated circuits, solar cells, and optical ...

BERKELEY, CA – In the electronics industry, thin metal films are deposited on silicon wafers with a sputter gun, which uses energetic ions – atoms with a positive charge – to knock the metal atoms off ...

The MEGA coating system (multi-source magnetron sputtering system) enables the production of new types of metallic or ceramic coatings in monolithic, graded or multi-layer arrangements using 7 ...

ULVAC is shipping PZT piezoelectric thin-film sputtering equipment which advances the development of MEMS devices. It used to be impossible to fabricate PZT piezoelectric thin films, which constitute ...